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Vertex Sensors

Vertex Single Sensor | Ion Energy Distribution

The Vertex Single Sensor is placed at any location inside a plasma reactor and measures the ion energy distribution as a function of aspect ratio, hitting a surface using a single sensor.

Plasma Parameters Measured:
Ion Energy as a Function of Aspect Ratio • Ion Energy • Ion Flux • Negative Ions • Bias Voltage (Vdc)

Vertex Multi Sensor | Ion Energy Distribution

The Vertex Multi-Sensor measures the ion energy distribution as a function of aspect ratio, hitting a surface inside a plasma reactor from multiple locations to analyse ion angle uniformity.

Plasma Parameters Measured:
Ion Energy as a Function of Aspect Ratio • Ion Energy Uniformity • Ion Flux Uniformity • Negative Ion Uniformity • Bias Voltage (Vdc)