Vertex Single Specifications

Measuring Parameters

Aspect Ratio Range 1 to 20
Aspect Ratio Resolution 0.5
Ion Energy Range 2000eV - Vdc
Ion Current 1mA DC max
Ion Flux Range 0.01 - 50 (A/m²)
IEDF Resolution ± 1eV nominal

Probe Bias Conditions

Max RF Bias Voltage 1kV pk-to-pk
Max DC Bias Voltage -1940V
Bias Frequency Range (Time Averaged Measurements) 100kHz to 80MHz
Bias Frequency Range (Time Resolved Measurements) 0Hz to 100kHz
Time Resolution 100 µs

*for pulsed plasmas with Vertex mounted on a grounded or floating electrode

RFEA Probe

Number of Sensors 1
Probe Configuration 4-grid
Button Probe Diameter 33mm
Holder Diameter 50mm, 100mm, 150mm, 200mm, 300mm and custom shapes
Holder Thickness 5mm
Max Operating Temperature 200ºC
Mounting RFEA Probe holder mounted on electrode
Probe Enclosure and Holder Material Aluminium, anodized aluminium, stainless steel* and ceramic (Al2O3)*
RFEA Probe Cable Length 650mm standard (custom available)

*on request

Feed-Through Assembly

Flange Type CF40 (Custom Available)

Control Unit Electronics

Grid Voltage Range -2kV to +2kV
Current Range 100pA to 2.4mA
Connectivity USB 2.0

Application Software

Operating System Windows 2000 / XP / Vista / Windows 7 / Windows 8

Operating Parameters

Pressure (Pascal) 0 to 40Pa*
Pressure (Torr) 0 to 300mTorr*
Density (for Ar at 3eV) 1012 to 1018m-3
Gas Reactivity Inert to highly reactive

*dependent on ion mean free path