Vertex Single Features

Vertex Electronics Unit

Electronics UnitThe Vertex electronics unit is built to the highest quality with an eye catching design and built to withstand the most demanding of laboratory environments. The 19” rack mounted unit contains the most advanced architecture designed to offer the most efficient measurements and analysis as close to real time as possible.

Software Suite

The Vertex software suite offers the most advanced analysis of any plasma measurement instrument on the market today. Carefully crafted over the past ten years by some of the world’s leading scientists in Plasma Measurement. The analysis has been peer reviewed in multiple publications and cited in hundreds. The user interface is designed to be easy to use and clutter free reducing the need to spend time figuring out how to use the system.

Sensor Holder

The Vertex sensor holder sits at the substrate position inside a plasma reactor. It can be placed at any position and even on a biased electrode. It can withstand temperatures up to 250°C without the need for cooling. The main purpose of the sensor holder is to hold the replaceable Button Probe sensors and to provide the customer with the option to match the holder size to that of their electrode or substrate. The holders are available in 100 mm, 150 mm, 200mm, 300mm, 450mm as standard and custom size holders are available on request.Holder Options

Replaceable Button Probe

Button ProbesDue to the harsh environments inside most plasma reactors we have designed the sensors to be replaceable. Depending on factors such as deposition rate and corrosive chemistries the sensors can have a life time from 10’s of hours to 100’s of hours inside a plasma reactor. With this in mind we have designed the sensor (Button Probe) to be disposable. Once the measurements start to drift you can simply replace the sensor and continue your measurements with very little down time.

Installation

Time in the lab is expensive and with this in mind we have designed our systems to allow users to be up and running is a very short period of time. For the beginner we have a “quick start” mode which allows users get the data they need as soon as they pump down their reactor and for the more advanced user we allow full access to the raw data.