Theory: Semion System | Retarding Potential Analyser | Retarding Field Energy Analyser

Click to read the new Theory of Operation for our Semion System. This highly versatile instrument measures ion energy, ion flux, negative ions, temperature and bias voltage at any location inside a plasma reactor, even at the substrate position. The multi-sensor version can also be used to look at uniformity issues that are very common in plasma processes. This gives valuable and unique data to many industries including etching, deposition, ion beam and space plasma.