Semion Sensors

Semion Single Sensor | Retarding Field Energy Analyser

The Semion Single Sensor is placed at any location inside a plasma reactor and measures the energy of ions hitting a surface using a single measurement sensor.

Plasma Parameters Measured:
Ion Energy • Ion Flux • Negative Ions • Bias Voltage (Vdc)

Semion Multi Sensor | Retarding Field Energy Analyser

Semion Multi Sensor

The Semion Multi-Sensor measures the uniformity of ion energies hitting a surface using a number of plasma measurement sensors.

Plasma Parameters Measured:
Ion Energy Uniformity • Ion Flux Uniformity • Negative Ion Uniformity • Bias Voltage (Vdc)