Semion used in a study of the effect of mid-frequency discharge assistance on dual-high power impulse magnetron sputtering

Today's application note introduces a hybrid-dual-HiPIMS system based on the simultaneous combination of dual-HiPIMS and MF discharges. The main body of the study is the time-resolved diagnostics taken using a Semion System during the deposition of Ti–Cu films, revealing the degree of assistance made by the MF discharge. Click here to download and read.