Measuring Parameters
| Ion Energy Range |
2000 eV - Vdc |
| Ion Current |
1 mA DC max |
| Ion Flux Ranges* |
Low: 0.001 - 3 | Std: 0.01 - 50 | High: 0.1 - 700 (A/m²) |
| IEDF Resolution |
± 1 eV nominal |
*Choice dependent on plasma density
Probe Bias Conditions
| Max RF Bias Voltage |
1 kV** (peak-to-peak) |
| Max DC Bias Voltage |
-1940 V |
| Bias Frequency Range (Time Averaged Measurements) |
100 kHz to 80 MHz |
| TTL Sync Range (Time Resolved Measurements) |
4 Hz to 100 kHz |
| Time Resolution* |
5 µs |
*For pulsed plasmas with Semion mounted on a grounded electrode, custom hardware required.
**At 13.56 MHz. Reduces to 0.3 kV at 60 MHz.
RFEA Probe
| Number of Sensors |
1 |
| Probe Configuration |
4-grid |
| Button Probe Diameter |
33 mm |
| Holder Diameter |
50 mm, 70 mm, 100 mm, 150 mm, 200 mm, 300 mm, 450 mm and custom shapes |
| Holder Thickness |
5 mm |
| Max Operating Temperature |
150º C |
| Mounting |
RFEA probe holder mounted on electrode |
| Probe Enclosure and Holder Material |
Aluminium, anodized aluminium, stainless steel* and ceramic (Al2O3)* |
| RFEA Probe Cable Length |
650 mm standard (custom available) |
*on request
Feed-Through Assembly
| Flange Type |
CF40 (custom available) |
Control Unit Electronics
| Grid Voltage Range |
-2 kV to +2 kV |
| Current Range |
100 pA to 2.4 mA |
| Connectivity |
USB 2.0 |
Application Software
| Operating System |
Windows 2000 / XP / Vista / Windows 7 / Windows 8 / Windows 10 |
Operating Parameters
| Pressure (Pascal) |
<0.1 Pa to 40 Pa* |
| Pressure (Torr) |
0 to 300 mTorr* |
| Density Ranges (Ar at 3eV) |
Low: 1.2 x 1012 to 7.4 x 1015 | Std: 2.0 x 1013 to 1.2 x 1017 | High: 2.7 x 1014 to 1.6 x 1018 (m-3) |
| Gas Reactivity |
Inert to highly reactive |
*dependent on ion mean free path
