Semion Single Specifications

Measuring Parameters

Ion Energy Range 2000 eV - Vdc
Ion Current 1 mA DC max
Ion Flux Ranges* Low: 0.001 - 3 | Std: 0.01 - 50 | High: 0.1 - 700 (A/m²)
IEDF Resolution ± 1 eV nominal

*Choice dependent on plasma density

Probe Bias Conditions

Max RF Bias Voltage 1 kV (peak-to-peak)
Max DC Bias Voltage -1940 V
Bias Frequency Range (Time Averaged Measurements) 100 kHz to 80 MHz
Bias Frequency Range (Time Resolved Measurements) 0 Hz to 100 kHz
Time Resolution* 5 µs

*For pulsed plasmas with Semion mounted on a grounded electrode, custom hardware required.

RFEA Probe

Number of Sensors 1
Probe Configuration 4-grid
Button Probe Diameter 33 mm
Holder Diameter 50 mm, 70 mm, 100 mm, 150 mm, 200 mm, 300 mm, 450 mm and custom shapes
Holder Thickness 5 mm
Max Operating Temperature 200º C
Mounting RFEA probe holder mounted on electrode
Probe Enclosure and Holder Material Aluminium, anodized aluminium, stainless steel* and ceramic (Al2O3)*
RFEA Probe Cable Length 650 mm standard (custom available)

*on request

Feed-Through Assembly

Flange Type CF40 (custom available)

Control Unit Electronics

Grid Voltage Range -2 kV to +2 kV
Current Range 100 pA to 2.4 mA
Connectivity USB 2.0

Application Software

Operating System Windows 2000 / XP / Vista / Windows 7 / Windows 8

Operating Parameters

Pressure (Pascal) <0.1 Pa to 40 Pa*
Pressure (Torr) 0 to 300 mTorr*
Density Ranges (Ar at 3eV) Low: 1.2 x 1012 to 7.4 x 1015 | Std: 2.0 x 1013 to 1.2 x 1017 | High: 2.7 x 1014 to 1.6 x 1018 (m-3)
Gas Reactivity Inert to highly reactive

*dependent on ion mean free path