RF Power Delivery Plasma Measurement

Request a quote or further specificationsSlight changes in power as a plasma input parameter affects the quality of a substrate. Monitoring the voltage, current and phase, harmonic information can be extracted giving better process stability.

Related Products

Octiv Poly 2.0 | VI Probe

The Octiv Poly is an in-line RF voltage, current and phase measurement system. It can measure a total of 5 fundamental frequencies simultaneously and harmonics with frequency agility at 1% accuracy and 1μs time resolution.

RF Parameters Measured:
Voltage (1μs Time Resolution) • Current (1μs Time Resolution) • Phase (1μs Time Resolution) • Impedance (1μs Time Resolution) • Harmonics (1μs Time Resolution)

Octiv Suite 2.0 VI Probe

The Octiv Suite is an in-line RF voltage, current and phase measurement system. It can measure a total of 5 fundamental frequencies simultaneously and harmonics with frequency agility at 1% accuracy and 1 micro second time resolution. It can reconstruct the RF wave-form from complex frequency spectra simultaneously and in plasma applications measure ion flux at the substrate position

RF Parameters Measured:
Voltage (1μs Time Resolution) • Current (1μs Time Resolution) • Phase (1μs Time Resolution) • Impedance (1μs Time Resolution) • Harmonics (1μs Time Resolution) • Ion Flux

Octiv Mono 2.0 | RF Wattmeter

The Octiv Mono is an in-line RF Watt meter. It measures a single fundamental frequency and has an accuracy rating of 1%. Each system has a drop down menu with a choice of 5 fundamental frequencies to choose from.

RF Parameters Measured:
Real Power (1μs Time Resolution) • Forward Power (1μs Time Resolution) • Reflected Power (1μs Time Resolution) • Impedance (1μs Time Resolution)

A word from our clients

"Impedans provides unique products, timely support, and always welcome customer’s feedback to further improve their product. It is a delight to work with Impedans’ development team"