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RF Power Delivery Plasma Measurement

Request a quote or further specificationsSlight changes in power as a plasma input parameter affects the quality of a substrate. Monitoring the voltage, current and phase, harmonic information can be extracted giving better process stability.

Related Products

Octiv Mono 2.0 | RF Power Meter

The Octiv Mono is an in-line RF power measurement system. It measures a single fundamental frequency and has an accuracy rating of 1%. Each system has a drop down menu with a choice of 5 fundamental frequencies to choose from.

RF Parameters Measured:
Real Power (1μs Time Resolution) • Forward Power (1μs Time Resolution) • Reflected Power (1μs Time Resolution) • Impedance (1μs Time Resolution)

Octiv Poly 2.0


The Octiv Poly is an in-line RF voltage, current and phase measurement system. It can measure a total of 5 fundamental frequencies simultaneously and harmonics with frequency agility at 1% accuracy and 1μs time resolution.

RF Parameters Measured:
Voltage (1μs Time Resolution) • Current (1μs Time Resolution) • Phase (1μs Time Resolution) • Impedance (1μs Time Resolution) • Harmonics (1μs Time Resolution)

Octiv Suite 2.0


The Octiv Suite is an in-line RF voltage, current and phase measurement system. It can measure a total of 5 fundamental frequencies simultaneously and harmonics with frequency agility at 1% accuracy and 1 micro second time resolution. It can reconstruct the RF wave-form from complex frequency spectra simultaneously and in plasma applications measure ion flux at the substrate position

RF Parameters Measured:
Voltage (1μs Time Resolution) • Current (1μs Time Resolution) • Phase (1μs Time Resolution) • Impedance (1μs Time Resolution) • Harmonics (1μs Time Resolution) • Ion Flux

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