The effect of driving frequency on the IVDF in a magnetron sputtering system using Impedans’ Semion RFEA System Post date March 30, 2023 ← The magnetic asymmetry effect in geometrically asymmetric RF capacitively coupled plasmas, characterized with Impedans’ Octiv Suite 2.0 VI probe and Semion RFEA system → Ion angular distribution measurement with a planar retarding field analyzer
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