Plasma diagnostics of low-pressure high-power impulse magnetron sputtering assisted by electron cyclotron wave resonance plasma Post date March 30, 2023 ← Determining the temporal evolution of negative ion density in the afterglow of reactive HiPIMS → A study of plasma parameters in a BAI 730 M triode ion plating system by means of a Langmuir probe and plasma mass and energy spectroscopy
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