Measuring Ion Velocity Distributions and Ion Energy Distributions using Retarding Field Energy Analyzers (RFEAs) Post date March 30, 2023
Investigation of ion ejection from a mini-helicon thruster using a Semion retarding field energy analyzer Post date March 30, 2023
Characterization of SiO2 pattern transfer in an ALE process using the Semion RFEA Post date March 30, 2023
Ion energy and angular distributions measured in a planar Ar/O2 ICP using the Semion RFEA system Post date March 30, 2023
Using Plasma Radio-Frequency Harmonic Emission for Clean Endpoint and Small Open Area Etch Endpoint Detection Post date March 30, 2023
Determination of ion and neutral deposition rates using a quartz crystal microbalance and a gridded energy analyzer Post date March 30, 2023
Measurement of deposition rates and ion energy distributions using the Quantum System Post date March 30, 2023
Ion velocity distribution measurement through high-aspect ratio holes using the Semion system Post date March 30, 2023
Impedans Langmuir Probe is used to measure the negative ions in an electro-negative plasma Post date March 30, 2023
Impedans Langmuir Probe and Octiv Suite are used to study the time dependencies of pulsed inductively coupled Ar and Ar/CF4 discharges Post date March 30, 2023
Impedans Langmuir Probe and Octiv Poly are used to study the nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively coupled argon discharges Post date March 30, 2023
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