Experimental investigations on time resolved characteristics of pulsed inductively coupled O2 /Ar plasmas using Impedans Langmuir Probe. Post date March 30, 2023 ← Impedans Semion RFEA System is used in Silicon etching in a pulsed HBr/O2 plasma – Ion flux and energy analysis → Impedans Langmuir Probe and Octiv Poly are used to study the nonlocal electron kinetics and spatial transport in radio-frequency two-chamber inductively coupled argon discharges
ImpedansImpedansImpedans