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Measure the key plasma parameters such as electron temperature, ion density, plasma potential and electron energy distribution function.
Our Langmuir Probe systems are modular and can be quickly and easily installed on chambers with various flange options. Our probes are also compatible with almost all chamber types.
Our software, which can be installed on any PC or laptop, is very intuitive and user friendly.
All of the products in our Langmuir range come with an optional linear drive. This can be used to automatically scan across the wafer and spatially characterize your plasma.
All of our systems come with replaceable tips making it easy to maintain the system.
Our Langmuir probe Systems have been used in 100's of publications and are accepted withing the community as a reliable data source.
The Langmuir Probe is one of the most common and widely used plasma diagnostics and measures parameters in the bulk of the plasma. The Impedans Langmuir Probe system measures the key plasma parameters such as floating potential, plasma potential, plasma density, ion current density, electron energy distribution function and electron temperature. The Plato probe is a unique planar Langmuir Probe designed by Impedans which continues to work even in applications where an insulating film is being deposited.
Measure the key parameters of your plasma so that you can understand and control the outcome.
Measure the parameters in real time, allowing you to make changes and monitor the effects live, saving hours of unnecessary setup and waiting.
Our Langmuir systems are very easy to install in any plasma chamber. The system is small enough to be easily portable meaning a single system can be used in multiple chambers. It has a main electronics unit and a probe with vacuum feedthrough. The probe comes with a CF40 flange but we can also provide adapters to alternative flanges as needed.
Our linear drives also come with a CF40 flange but adapters can be provided.
Our software has been designed to be easy to use and can be installed on any laptop or PC.
Once installed the software allows the user to configure the system, run the scan, visualize the data and import/export data as needed.
The system will automatically apply the complex langmuir probe algorithms to present the calculated parameters. The user also has the option to chose between several algorithms.
Our systems come with an optional linear drive which allows you to scan spatially across your plasma. The software communicates with the linear drive allowing you to control the positioning and plot the data within the software saving you time and effort when analyzing your data.
The linear drives come with bellows support, a full cover and manual readouts.
All of our langmuir probes come with replaceable tips meaning they can easily be replaced when maintenance is required. We have several tip and material options to choose from to best suit your application.
Our Langmuir Probes have been used in many publications across the world. They have been accepted by the community as a go to source of plasma data that is trusted and reliable. This means you can rest assured that your data is accurate, reliable and will not be questioned, giving your research more credibility and a higher acceptance rate.
Check out the link here for a sample of the publications where our probes have been used.
| Langmuir Probe | |
|---|---|
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Spatial Measurements |
Yes |
|
The Plato Probe is a planar Langmuir Probe designed to work in deposition plasmas when an insulating film will be deposited on the probe surface. The deposition tolerant probe can remain inside a plasma reactor while deposition processes are in progress. |
No |
|
Electron Temperature |
Yes |
|
Ion Current Density |
Yes |
|
Ion Density |
Yes |
|
Debye Length |
Yes |
|
Plasma Potential |
Yes |
|
Floating Potential |
Yes |
|
Electron Current Density |
Yes |
|
Electron Density |
Yes |
|
Electron Energy Distribution Function |
Yes |
| Plato Probe | |
|---|---|
|
|
|
|
Spatial Measurements |
Yes |
|
The Plato Probe is a planar Langmuir Probe designed to work in deposition plasmas when an insulating film will be deposited on the probe surface. The deposition tolerant probe can remain inside a plasma reactor while deposition processes are in progress. |
Yes |
|
Electron Temperature |
Yes |
|
Ion Current Density |
Yes |
|
Ion Density |
Yes |
|
Debye Length |
Yes |
|
Plasma Potential |
No |
|
Floating Potential |
No |
|
Electron Current Density |
No |
|
Electron Density |
No |
|
Electron Energy Distribution Function |
No |
