Plato Probes

Plato Probe

The Plato Probe is a planar Langmuir Probe designed to work in deposition plasmas when an insulating film is deposited on the probe surface.

Plasma Parameters Measured:
Plasma Density • Ion Current Density • Electron Temperature

Plato Spatial Probe

The Plato Spatial Probe scans across the bulk of a plasma and measures the parameters at different locations even when depositing an insulating layer up to 10 microns thick on the probe surface.

Plasma Parameters Measured:
Plasma Density Uniformity • Ion Current Density Uniformity • Electron Temperature Uniformity