"I would recommend Impedans to anyone seeking plasma measurement systems"
Director | Dutch Institute for Fundamental Energy Research, The Netherlands
The Plato Spatial Probe is a Langmuir probe for deposition plasma. It scans across the bulk of a plasma to measure the uniformity of plasma parameters at different locations. It is designed to work in deposition plasmas even when an insulating layer is deposited on the probe surface.
The Plato Probe measures plasma parameters such as plasma density, ion current density and electron temperature at different locations across the plasma even when the plasma has a high deposition rate.
It is now possible to measure the uniformity of plasma parameters in a plasma depositing an insulating layer.
The Plato Spatial Probe comes complete with an automated linear drive system which measures the main parameters of plasma at different locations inside a plasma reactor. The Plato Spatial Probe is the first Langmuir probe on the market that can operate in a plasma with high deposition rates and key to its success is its ability to measure accurately the key plasma parameters through an insulating layer several microns thick. The deposition of insulating layers does not affect the accuracy of the probe's plasma characterisation.
The Plato Spatial Probe is a unique instrument enabling scientists to measure the electron density, Ion density, electron temperature and floating potential at different locations inside a plasma. The Plato Spatial Probe provides plasma parameter measurement in DC, RF, microwave, continuous and pulsed plasma. The Plato Spatial Probe has the most advanced patented technology on the market using ultra-fast biasing to penetrate the deposited film to obtain accurate characterisation of the real plasma parameters in a wide range of plasma applications.
The Plato Spatial Probe is used to establish plasma process repeatability, even in reactive gas plasma sometimes found in applications such as plasma enhanced chemical vapour deposition (PEVCD). It is the perfect instrument to understand plasma changes and the impact on surface treatment including plasma uniformity. Pulsed plasmas are used to tailor the electron or ion energy and the Plato Spatial Probe is an integral part of such a process development.
Time Averaged Measurements
This provides an average over time of the plasma parameters measured by the Plato Spatial Probe in the bulk of the plasma.
Time Resolved Measurements
This allows the user to synchronise the plasma parameters measured by the Plato Spatial Probe with an internal synchronisation signal. The user can then obtain detailed information on the plasma parameters as a function of time or phase through the synchronisation pulse period. Typically the pulse period would be on a timescale of milliseconds to microseconds.
Time Trend Measurements
This allows the user to obtain information on the variation of the plasma parameters as time progresses through a particular process. This feature does not require external synchronisation and the timescales involved can be in range of seconds to hours.
The user-friendly electronics and software takes accurate and reliable measurements with a speed not seen on any other commercial Langmuir Probe. Using an intelligent pre-scan feature, the optimal plasma parameter measurements are performed easily and repeatedly.
Probe tips are easily replaced with the “Easy-Fit” probe tip holder design. Probe tip material is tungsten as standard, with molybdenum, platinum and invar available. Custom probe lengths, diameters, materials, and shapes can be supplied on request and easily updated in the software analysis.
A high-speed mode is available to support high resolution time-resolved measurements with a time-step resolution of 10µs for pulsed and low frequency applications. Trigger frequencies 10Hz to 50kHz are supported, and a built-in programmable delay allows gating of the probe measurements.
In applications where high speed resolution is not required averaging the measurement over a number of data points can be used to significantly reduce the noise.
The Plato Probe System is equipped with a TTL trigger of 10Hz to 50kHz.
The Plato Probe includes RF chokes to provide RF compensation at the plasma driving frequency.
Plasma Density | 4x10⁸ to 3x10¹³cm⁻³ |
Ion Current Density | 26µA/cm² to 300mA/cm² |
Electron Temperature | 0.1 to 15eV |
Plasma Power Source | DC, RF, Microwave, Continuous, Pulsed Plasma |
RF Plasma | Broadband Probe 13.56MHz to 100MHz |
Probe Length | 300mm to 1400mm (Custom Available) |
Probe Diameter | 9.5mm |
Probe Tip Diameter | 7mm |
Probe Customisation | On Request |
Maximum Operating Temperature | 230°C |
Step Resolution | 0.025mm |
Control Mechanism | Automated through software |
Drive Length | 300mm, 450mm, 600mm or Custom |
Probe Voltage Scan Range | Floating Potential ±30V |
Current Range | 300µs to 20mA |
Communication | USB 2.0 |
Signal Bandwidth | 40 kHz |
Data Acquisition Resolution | 4.5mV, 4.5nA |
Time Resolved Step Resolution | 10µS to 1mS |
External Trigger | 10Hz to 50KHz |
Operating System | Windows 2000 / XP / Vista / Windows 7 / Windows 8 / Windows 10 |
Pressure (Pascal) | <0.1Pa to 1,000Pa |
Pressure (Torr) | <1mTorr to 10Torr |
Density | 10⁶cm⁻³ to 10¹⁴cm⁻³ |
Gas Reactivity | Inert to Highly Reactive |
Power Frequency | DC (0kHz) • pDC (10 to 50kHz) • RF (13.56MHz to 100MHz) UHF (100MHz to 1GHz) Microwave (1GHz to 3 GHz) |
The Plato Spatial Probe used in Dusty Plasma applications |
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Coming soon |
The Plato Spatial Probe used in Plasma Etching applications |
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Coming soon |
The Plato Spatial Probe used in HiPIMS Plasma applications |
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Characterization of HiPIMS plasma via process compatible measurement probeAbstractThis study looks at the characterization of a HiPIMS plasma using a process compatible plasma measurement probe which can be used in situations which require measurements at a fast time resolution, where in some cases the application may be depositing insulating layers.
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The Plato Spatial Probe used in PECVD applications |
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Coming soon |
The Plato Spatial Probe used in Space Plasma applications |
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Coming soon |
The Plato Spatial Probe used in Plasma Sputtering applications |
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Coming soon |
"I would recommend Impedans to anyone seeking plasma measurement systems"
Director | Dutch Institute for Fundamental Energy Research, The Netherlands