Octiv VI Technology - Technical note

Octiv VI Probe Technology - Theory of Operation

Octiv VI Probe Technology - Voltage | Current | Phase | Impedance
Octiv VI Probe Technology - Theory of Operation

Abstract

This technical note describes the theory and architecture behind Octiv VI Probe technology. The Octiv VI probe is an advanced RF voltage and current sensor, which can provide real-time information on complex loads. Real-time information the Octiv provides includes voltage, current, phase, power and impedance on all harmonics of a chosen frequency simultaneously, as well as transmission line parameters such as forward power, reflected power, standing wave ratio (SWR) and reflection coefficient. The Octiv sensor was designed to meet the need for post-match voltage and current measurements in RF excited plasma processes.

Learn more about our Octiv system here