Octiv Suite Features

Measurement Functionality

Octiv Suite Pulsed Power Measurement
The Octiv Suite measures the pulsed power time profile at micro second resolution while maintaining a very high degree of accuracy (1%). It measures a single frequency at a time and 15 of its harmonics. The user can select the frequency they wish to analyse from a drop down menu of 5 frequencies or the user can request 5 specific frequencies at the time of order.

Meter View
View process parameters as they are acquired by the sensor. This feature provides a useful way of monitoring RF power delivery during process hardware setup and installation. Data can be recorded to a file for analysis.

Smith Chart View
Monitor the Load Impedance as it is displayed on a Smith Chart and track Impedance variations throughout the process cycle.

Harmonic View
With the unique Harmonic View, the voltage and current harmonics of the delivered signal may be monitored in real time. Observe the harmonic content of the delivered power, and intuitively identify harmonic components which may be sensitive to process variations.

Time Trend View
Use the Time Trend view to monitor each RF parameter in real-time. Visualise time-series data as it is acquired. Acquire an overview of each parameter during the process run and monitor run-to-run or chamber-to-chamber variations.

Probe

Compact Design
The Octiv Suite is designed to be compact and easy to install. It is mounted between the match unit and the plasma chamber to give the most accurate measurement of the RF delivery into the plasma chamber.

Software

Frequency Agility
The Octiv Suite allows the user to accurately measure the RF parameters while tracking a rapidly varying fundamental frequency. For example: in variable frequency tuning to match the plasma.

Software Application Programmers Interface (API)
A comprehensive API is provided with the sensor to facilitate integration with 3rd party software applications. Sensor initialisation, configuration, and data transfer functions are easily implemented on all of the common software platforms.

Communications Interface
The standard Octiv communications interface is USB 2.0, which provides power to the sensor, and supports sensor configuration and data transfer activities in a laboratory environment. For integration with industrial equipment and manufacturing automation systems, alternative communications interfaces are available and based on RS-232 or Ethernet. Electrical isolation ensures the reliable transfer of data even in RF environments.