The Octiv Poly VI Probe is a multi-frequency in-line RF voltage, current and phase measurement system. It can measure multiple fundamental frequencies and its harmonics simultaneously and has an accuracy of 1% with 1μs time resolution. The VI Probe can detect and measure up to 5 fundamental frequencies and all their components (Voltage, Current, Phase Angle and Harmonics) at the same time.
The VI probe measures voltage, current, phase, impedance and harmonics and the measurements can be viewed from a PC or direct to the meter unit.
The Octiv Poly system allows users to measure a number of fundamental frequency and extract all the harmonic information of each parameters measured simultaneously.
Features
Fully Customisable Form Factor | Match Unit Integration | Pulsed RF and Frequency Tuning | Integration Between Match and Chamber | Multi-Frequency Sensing
Applications
Process Fingerprinting | Chamber Matching | Wafer Placement | Process Health Indexing | Fault Detection | Process Control
The Octiv Poly VI Probe is a precision power and impedance sensor which normally sits post-match unit. It is used to measure the load impedance in applications such as plasma processes. It monitors voltage, current and phase of multiple fundamental frequencies and their harmonics. The Octiv Poly VI Probe is ideal for accurately monitoring dual frequency and triple frequency plasma systems.
The Octiv Poly has a power range from 0 to 12kW and is calibrated at 5 different Frequencies: 2MHz | 13.56MHz | 27.12MHz | 40.68MHz | 60MHz. The system is frequency agile and can detect other frequency bands.
The Octiv Poly is a high precision, high resolution sensor and high speed data acquisition unit combined. The Octiv Poly is the only precision power and impedance sensor with micro second resolution in pulsed applications. The Octiv Poly uses unique patented VI probe technology, designed for reliable operation in simultaneous multi-frequency applications with agile frequency tuning.
The Octiv Poly helps solve issues such as poor production yields, tool matching, fault detection, fingerprinting and classification. The RF parameters are strongly correlated with plasma parameters. The Octiv Poly VI Probe provides a wide range of parameters suitable for use in multivariate analyses in end point applications development. The Octiv Poly VI Probe allows you to indirectly measure plasma parameters helping you to understand and control the process. It helps to define exact process windows and determines the health of power subsystems. The Octiv Poly helps determine process run to run stability. It gives you the confidence and insight to measure the power delivery parameters and map the plasma state.
RF Parameters Measured
Voltage (1μs Time Resolution)
Current (1μs Time Resolution)
Phase (1μs Time Resolution)
Harmonics (1μs Time Resolution)
Impedance (1μs Time Resolution)
Measurement Functionality
Time Averaged Measurements This provides an average over time of voltage, current and phase.
Time Resolved Measurements This allows the user to synchronise the V,I & Phase measurements with an external synchronisation signal. The user can then obtain detailed information on the ion energy distribution as a function of time or phase through the synchronisation pulse period. Typically the pulse period would be on a timescale of milliseconds to microseconds.
Time Trend Measurements This allows the user to obtain information on the variation of the voltage,current and phase as time progresses through a particular process. This feature does not require external synchronisation and the timescales involved can be in range of seconds to hours.
Smith Chart Measurements Monitor the Load Impedance as it is displayed on a Smith Chart and track Impedance variations throughout the process cycle.
Compact Design The Octiv Poly is designed to be compact and easy to install. It can be mounted pre- or post-match. The ideal position to give the most accurate measurement of the RF delivery into the plasma chamber is between the match unit and the plasma chamber.
Meter Display Unit (Optional Extra)
Octiv Poly Probe Meter Display Unit Each Octiv Poly Probe can come with an optional portable touch screen display meter. Alternatively the customer might decide to connect their PC directly to the Octiv Sensor and run their measurements through the Octiv dedicated software, supplied with each Octiv Poly Probe.
Octiv Poly Pulsed Power Measurement The Octiv Poly measures the pulsed power time profile at micro second resolution while maintaining a very high degree of accuracy (1%). It measures a single frequency at a time and 15 of its harmonics. The user can select the frequency they wish to analyse from a drop down menu of 5 frequencies or the user can request 5 specific frequencies at the time of order.
Meter View View process parameters as they are acquired by the sensor. This feature provides a useful way of monitoring RF power delivery during process hardware setup and installation. Data can be recorded to a file for analysis.
Smith Chart View Monitor the Load Impedance as it is displayed on a Smith Chart and track Impedance variations throughout the process cycle.
Harmonic View With the unique Harmonic View, the voltage and current harmonics of the delivered signal may be monitored in real time. Observe the harmonic content of the delivered power, and intuitively identify harmonic components which may be sensitive to process variations.
Time Trend View Use the Time Trend view to monitor each RF parameter in real-time. Visualise time-series data as it is acquired. Acquire an overview of each parameter during the process run and monitor run-to-run or chamber-to-chamber variations.
Software
Frequency Agility The Octiv Poly allows the user to accurately measure the RF parameters while tracking a rapidly varying fundamental frequency. For example: in variable frequency tuning to match the plasma.
Software Application Programmers Interface (API) A comprehensive API is provided with the sensor to facilitate integration with 3rd party software applications. Sensor initialisation, configuration, and data transfer functions are easily implemented on all of the common software platforms.
Communications Interface The standard Octiv communications interface is USB 2.0, which provides power to the sensor, and supports sensor configuration and data transfer activities in a laboratory environment. For integration with industrial equipment and manufacturing automation systems, alternative communications interfaces are available and based on RS-232 or Ethernet. Electrical isolation ensures the reliable transfer of data even in RF environments.
Impedans Octiv used in a study demonstrating a simple radio-frequency (RF) power-coupling scheme for a micro atmospheric pressure plasma jet
Abstract
In this paper, the authors demonstrate a simple radio frequency (RF) power-coupling scheme for a micro atmospheric pressure plasma jet (μAPPJ) based on a series LC resonance, with the discharge gap being part of the resonant element. The Impedans Octiv was used in the experiment.
The Octiv VI probe is an advanced RF voltage and current sensor, which can provide real-time information on complex loads. Real-time information the Octiv provides includes voltage, current, phase, power and impedance on all harmonics of a chosen frequency simultaneously, as well as transmission line parameters such as forward power, reflected power, standing wave ratio (SWR) and reflection coefficient. The Octiv sensor was designed to meet the need for post-match voltage and current measurements in RF excited plasma processes.
High power radio-frequency (RF) voltage and current sensors need to be accurately calibrated to a traceable standard. Calibrating to high accuracy can be the most challenging aspect of high power, voltage-current sensor manufacture. This is due to the many sources of error in any calibration process. If the calibration is performed accurately and correctly, then most errors can be characterized and removed.
In this technical note, communication via industrial protocols such as EtherCat and Ethernet/IP are described. The Octiv VI probe is an advanced and versatile radio-frequency (RF) voltage and current sensor. It can be used in a variety of installation environments and has a wide range of applications. It sees widespread deployment on RF processing equipment used in the semiconductor (and related industries) and in the medical market. For research and development (R&D) activities, the Octiv application software supplied with the product is sufficient for data management. For industrial applications, customers want to process and store data in their own systems and therefore the flexibility to transmit the Octiv data using a range of protocols is critical.
OC02: Impedans Octiv used in a study demonstrating a simple radio-frequency (RF) power-coupling scheme for a micro atmospheric pressure plasma jet (μAPPJ)
