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Octiv Mono 2.0


Octiv 2.0 Has Arrived

The Next Generation In RF Sensing Technology

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Octiv Mono

The Best RF Power & Impedance Meter On The Market

The Octiv Mono is an in-line RF power meter and RF power sensor measurement system. It measures a single fundamental frequency and has an accuracy rating of 1%. Each system has a drop down menu with a choice of 5 fundamental frequencies to choose from.

It measures real power, forward power, reflected power and impedance and displays through a meter unit or direct to a laptop or PC via USB.

The Octiv Mono RF power meter and RF power sensor can measure up to five different fundamental frequencies in a single sensor. This reduces the need for multiple sensors in a laboratory environment.



Features

Interchangeable Connectors | Wide Power Range |
Multiple Frequency Calibration | Pulsed RF Functionality


Applications

RF Subsystem Health Indexing | Match Network Characterization |
Generator Output Verification | Transmission Line Mis-Match Identification




Overview

The Octiv Mono is a precision RF power sensor used in a large number of laboratory applications. The Octiv Mono operates to 1% true accuracy, and is immune to harmonics making it the most trusted power sensor for applications such as semiconductor manufacturing.

The Octiv Mono is calibrated to five fundamental frequencies: 2MHz | 13.56MHz | 27.12MHz | 40.68MHz | 60MHz. Each frequency can be selected via a drop down menu and the sensor has a power range from 0 to 12 kW.

The Octiv Mono takes the confusion out of choosing a precision RF power sensor and reduces your cost by providing a one sensor fits all solution. The Octiv Mono covers the full RF power and frequency range in a single RF power sensor needed for most laboratory applications. The Octiv Mono gives you a choice of five standard frequency ranges in a single RF power sensor and RF power meter.

The Octiv Mono RF power meter and RF power sensor helps solve issues such as poor production yields, tool matching, fault detection and classification. It helps to define exact process windows and determines the health of power subsystems. The Octiv Mono helps determine 'process run to run' stability. It gives you the confidence to trust the accuracy of the most complex process input, RF power delivery.

RF Parameters Measured

  • Real Power
  • Forward Power
  • Reflected Power
  • Impedance

Measurement Functionality

Time Averaged Measurements
This provides an average over time of the RF power measurements required.

Time Resolved Measurements
This allows the user to synchronise measurements with an external synchronisation signal. The user can then obtain detailed information on the power distribution as a function of time or phase through the synchronisation pulse period. Typically the pulse period would be on a timescale of milliseconds to microseconds.

Time Trend Measurements
This allows the user to obtain information on the variation of power as time progresses through a particular process. This feature does not require external synchronisation and the timescales involved can be in range of seconds to hours.

Smith Chart Measurements
Monitor the Load Impedance as it is displayed on a Smith Chart and track Impedance variations throughout the process cycle.

Further Product Information

Probe

Compact Design
The Octiv Mono is designed to be compact and easy to install. It is mounted between the match unit and the generator to give the most accurate measurement of the RF delivery into the plasma chamber.

Octiv Mono Pulsed Power Measurement
The Octiv Mono measures the pulsed power time profile at micro second resolution while maintaining a very high degree of accuracy (1%). It measures a single frequency at a time and 15 of its harmonics. The user can select the frequency they wish to analyse from a drop down menu of 5 frequencies or the user can request 5 specific frequencies at the time of order.

Meter View
View process parameters as they are acquired by the sensor. This feature provides a useful way of monitoring RF power delivery during process hardware setup and installation. Data can be recorded to a file for analysis.

Smith Chart View
Monitor the Load Impedance as it is displayed on a Smith Chart and track Impedance variations throughout the process cycle.

Time Trend View
Use the Time Trend view to monitor each RF parameter in real-time. Visualise time-series data as it is acquired. Acquire an overview of each parameter during the process run and monitor run-to-run or chamber-to-chamber variations.

Electronics Unit (Optional Extra)

Octiv Mono Meter Display UnitElectronics Unit
Each Octiv Mono can come with an optional portable touch screen display meter which can also be rack mounted. Alternatively the customer might decide to connect their PC directly to the Octiv Sensor and run their measurements through the Octiv dedicated software, supplied with each Octiv Mono

Software

Frequency Agility
The Octiv Mono allows the user to accurately measure the RF parameters while tracking a rapidly varying fundamental frequency. For example: in variable frequency tuning to match the plasma.

Software Application Programmers Interface (API)
A comprehensive API is provided with the sensor to facilitate integration with 3rd party software applications. Sensor initialisation, configuration, and data transfer functions are easily implemented on all of the common software platforms.

Communications Interface
The standard Octiv communications interface is USB 2.0, which provides power to the sensor, and supports sensor configuration and data transfer activities in a laboratory environment. For integration with industrial equipment and manufacturing automation systems, alternative communications interfaces are available and based on RS-232 or Ethernet. Electrical isolation ensures the reliable transfer of data even in RF environments.

Measuring Parameters

Power Real (Watt) 200mW to 12 KW
Power Forward (Watt) 200mW to 12 KW
Power Reflected (Watt) 200mW to 12 KW
Power Real (dBm) 25dBm to 70dBm
Power Forward (dBm) 25dBm to 70dBm
Power Reflected (dBm) 25dBm to 70dBm
Impedance 1 to 500Ω

Sensor Performance

Accuracy ± 1% (at frequencies and power defined)
Number of Frequencies 5 interchangable
Frequency Range 350kHz to 100MHz
Uniformity 2% Maximum
Speed 10 Readings per Second
Maximum Power 12kW
Harmonic Interference No Limit (Within Power Range)
VSWR Range 1.0 – 2.0
Directivity 38dB
Sensor Impedance 50 Ω

Sensor Specifications

Connectors All Standard Connectors Available
Power Requirements USB or From Display Unit
Dimensions 70mm x 70mm x 55mm
Weight 400g
Operating Temperature 0ºC to 35ºC
Storage Temperature -40ºC to 80ºC
Humidity 95% Max (non-condensing)
Altitude 3000m
Certification CE mark
Calibration Cycle 12 Months

Display Meter

Dimensions 350 x 200 x 120mm
Display Touch Screen LCD
Weight 1.5Kg
Connections Analog I/O, Digital I/O, Ethernet, Devicenet

Application Software

Operating System Windows 2000 / XP / Vista / Windows 7 / Windows 8

Operating Parameters

Impedance 50Ω
dBm 20dBm to 70dBm
Power 10W to 10kW
Power Frequency MF (350kHz to 1MHz) • RF (1MHz to 100MHz)

The Octiv Mono used in RF Match Network Characterization applications

Octiv Mono used in RF Match Network Characterization to measure match-unit range, efficiency, quality and internal resistance

Abstract

It is reported that a RF match network can have up to 50% power loss in a plasma process or any process with a RF power delivery system to a non-50ohm load causing variability within the process. In this document we discuss a novel method to characterize a matching network using two Octiv Monos

Octiv Mono used in RF Matching Network Characterization.pdf

Technical note

OCTIV - Theory of Operation

Abstract

The Octiv VI probe is an advanced RF voltage and current sensor, which can provide real-time information on complex loads. Real-time information the Octiv provides includes voltage, current, phase, power and impedance on all harmonics of a chosen frequency simultaneously, as well as transmission line parameters such as forward power, reflected power, standing wave ratio (SWR) and reflection coefficient. The Octiv sensor was designed to meet the need for post-match voltage and current measurements in RF excited plasma processes.

OC03: Octiv VI Probe - Theory of Operation

OCTIV - Standards of Calibration

Abstract

High power radio-frequency (RF) voltage and current sensors need to be accurately calibrated to a traceable standard. Calibrating to high accuracy can be the most challenging aspect of high power, voltage-current sensor manufacture. This is due to the many sources of error in any calibration process. If the calibration is performed accurately and correctly, then most errors can be characterized and removed.

OC04: Octiv VI Technology - Standards of Calibration

Plasma Parameter Aspects in the Fabrication of Stable Amine Functionalized Plasma Polymer Films

Carla Daunton, Louise E. Smith, Jason D. Whittle, Robert D. Short, David A. Steele and Andrew Michelmore

Published 12th February 2015

Abstract

Amine containing plasma polymer films are of interest due to their ability to bind biomolecules either covalently or electrostatically. One issue with generating such plasma polymers is the need to generate sufficient amine density on the surface to enable binding, while simultaneously maintaining the chemical, physical stability of the surface in aqueous media. Here we investigate the relationship between plasma parameters, film stability for two commonly used monomers, allylamine AA, ethylenediamine EDA. Plasma polymer films from AA, EDA were produced at radio frequency RF powers between 2 and 20 W at a constant monomer flowrate. Deposition rate, ion flux, ion energy, plasma phase mass spectrometry were used to investigate the plasma-surface interactions. Film stability was assessed by comparing X-ray photoelectron spectroscopy XPS, atomic force microscopy AFM measurements before, after washing in phosphate buffered saline PBS. The results show that films generated from EDA plasmas are generally unstable in aqueous media, while films generated from AA plasmas exhibit higher stability, particularly those deposited at high RF power. The chemical, physical stability of the films is then related to the mechanisms of deposition, the energy density provided to the surface during film growth.

Online at Plasma Process. Polym. 2015, 12, 817–826 DOI: 10.1002/ppap.201400215


An Experimental and Analytical Study of an Asymmetric Capacitively Coupled Plasma Used for Plasma Polymerization

Andrew Michelmore, Jason D. Whittle, Robert D. Short, Rod W. Boswell, Christine Charles

Published 4th June 2014

Abstract

Plasma processing is widely used to provide novel surface modifications to materials for a variety of
applications. Typically, the systems used to carry out these modifications are poorly characterised. Here we describe the basics of a global model for a capacitively coupled asymmetric parallel plate radiofrequency plasma system routinely used to produce plasma polymers. An analytical global model was developed for argon, for which cross-sections are known, at a constant pressure of 1 Pa, and includes an electrical model and a power balance. The main parameters of interest were ion flux and self-bias voltages. The argon modelling results were then compared to experimental results for a range of operating gases (argon, oxygen, amines, acids, alcohols, ethers, siloxanes) including both saturated and unsaturated compounds with molecular weights ranging from 40 to 162 g mol1, for different inter-electrode separations and from 2 to 50 W using an Impedans OctIV probe. Importantly, it is shown that the RF power transfer efficiency is dependent on the gas. The results show that the argon model results can be used to predict the plasma parameters for other gases when the RF power transfer efficiency is taken into account.

Online at Plasma Process. Polym. 2014, 11, 833–841 DOI: 10.1002/ppap.201400026


Octiv Mono set-up

Operational video showing the quick and easy set-up of the Octiv Mono within it's application


Try out our latest Octiv software and sample data of a match-unit characterized

Octiv
Octiv software

Match Unit Characterization files
Mono 1 non 50ohm data file
Mono 2 50ohm load data file

Application Note
Octiv Mono used in RF Match Network Characterization to measure match-unit range, efficiency, quality and internal resistance

RF Matching Network Characterization using two Octiv Monos

Operational video showing the quick and easy steps to characterize a RF impedance match unit


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