Moduli | RF Spectrometer

RF Spectrometer Non Invasive Fault Detection
RF Spectrometer Non Invasive Fault Detection

The RF Spectrometer has arrived


The RF Spectrometer is a non-invasive plasma sensor that works by analyzing the RF emitted by the plasma through a view port. It can indirectly measure changes in plasma impedance by monitoring the fundamental RF frequency and the higher harmonics emitted from the plasma. This is designed for fault detection on production tools without the need for an in-line sensor in the RF path. To learn more about the RF spectrometer visit or download the datasheet below.

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