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Allows the user to gather data which correlates with voltage/current in scenarios where an inline solution is impractical.
Measure parameters which correlate with the magnetic and electric fields from the plasma.
The RF Spectrometer is a radio-frequency (RF) detector that directly monitors the harmonics emitted by a plasma from outside the plasma chamber. The sensor is best used in scenarios where integrating an in-line RF sensor is physically impossible. The sensor has been used for endpoint detection and fault detection on production tools. It has demonstrated superior performance to optical techniques for low open area endpoint applications. It has also been proven to detect air leaks, wafer displacement and other serious plasma faults. Simply mount the RF antenna either on the viewport, a matchbox fan or through the matchbox wall to start process characterization
The RF Event Detectors are a non-invasive solution for plasma monitoring. This Radio Emission Spectroscopy (RES) tool can be placed anywhere outside the plasma source where small RF leakage is present – at a window port, for example.
The antenna is split into two parts; an antenna pick-up which can be inserted within the chamber RF shielding manifold and the circuitry which remains outside. This allows measurement within the RF environment.
The RF Spectrometer measures parameters that correlate with the electric and magentic fields emitted by the plasma. These parameters can be used in applications to detect end-point and faults.
Acquisition Unit
Antenna
| Part Number | Part | Frequency Range | Notes | |
|---|---|---|---|---|
|
02-0260-01 |
Acquisiton Unit |
350kHz – 500MHz |
Compatible with all antennas |
|
|
02-0255-01 |
Acquisition Unit |
40kHz – 2MHz |
Compatible with all antennas |
|
|
02-0494-01 |
RF Antenna – 1x |
40kHz – 500MHz |
E and B Channel with phases |
|
|
02-0495-01 |
RF Antenna – 100x |
40kHz – 60MHz |
10x Volatge & 100x Current Channel |
|
