Langmuir Single Probe used in determining the temporal evolution of negative ion density in the afterglow of reactive HiPIMS of titanium in an argon/oxygen gas mixture

This study used a Langmuir Single Probe to determine the temporal evolution of the oxygen negative ion and electron densities during the offtime of a reactive HiPIMS discharge operating in argon–oxygen gas mixtures. The aim of the study was to add to the knowledge base information about oxygen negative ion dynamics that will help many plasma processing methods. Click here to download and read.