Langmuir Probe Specifications

Measuring Parameters

Floating Potential -145V to 145V
Plasma Potential -100V to 145V
Plasma Density 10⁶ to 3x10¹³cm⁻³
Ion Current Density 1µA/cm² to 300mA/cm²
Electron Temperature 0.1 to 15eV
Electron Energy Distribution Function 0 to 100eV

Langmuir Probe Specifications

Plasma Power Source DC, RF, Microwave, Continuous, Pulsed Plasma
RF Plasma RF Compensation filters for up to 5 arbitrary frequencies built-in
Probe Length 100 mm to 1400 mm (Custom Available)
Probe Diameter 10 mm (6.5 mm and Custom Available)
Probe Tip Length 10 mm (Custom Available)
Probe Tip Diameter 0.4 mm (Custom Available)
Probe Tip Material W, Ta, Ni, Pt. (Custom Available)
Probe Customisation 90°, 45° Bend (Custom Available)
Maximum Operating Temperature 230 °C (Custom up to 900 °C)

Electronics Control Unit

Probe Voltage Scan Range -150 V to +150 V
Current Range 15 nA to 150 mA standard, 1.5 µA to 1 A for high current densities, 1.5 nA to 15 mA for low current densities
Communication USB 2.0
Sampling Rate 80 MSPS (V, I)
Data Acquisition Resolution 4.5 mV, 4.5 nA
Time Resolved Step Resolution 12.5 nS
External Trigger TTL Compatible 1 Hz to 1 MHz

Application Software

Operating System Windows 2000 / XP / Vista / Windows 7 / Windows 8 / Windows 10

Operating Parameters

Pressure (Pascal) 0 to 1,000 Pa
Pressure (Torr) | Single Probe 0 to 10 Torr
Pressure (Torr) | Double Probe 0 to 760 Torr
Gas Temperature 20 ºC to 230 ºC
Density 10⁴cm⁻³ to 10¹⁴cm⁻³
Gas Reactivity Inert to Highly Reactive
Power Frequency DC (0kHz) • pDC (0 to 350kHz) • MF (0 to 1MHz) • RF (1MHz to 100MHz) • Microwave (1GHz to 3 GHz)