Ion Beam

Ion BeamSimilar in concept to sandblasting, the ion beam application uses individual atoms in an ion beam to ablate a target. The physical sputtering effect is improved by using chemical reactivity in a process known as reactive ion etching. Focused ion beam instruments use a high-brightness beam in a scanned raster pattern to remove material in exact rectilinear patterns.

Broad ion beams are used to coat optical components where the ion beam assists the chemical reaction and helps remove non-volatile material during the process.


Semion Sensors

The Semion Sensor measures the uniformity of ion energies hitting a surface in a plasma chamber.


Vertex Sensors

The Vertex Multi-Sensor measures the angle of ions hitting a surface inside a plasma reactor to analyse ion angle uniformity.


Quantum Sensors

The Quantum is a unique instrument to measure the ratio of ions to neutrals hitting a surface inside a plasma reactor.


Species Sensors

The Species Sensor measures the uniformity of ion species (mass) hitting a surface in a plasma chamber.


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