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Industrial Octiv 2.0



Octiv 2.0 Has Arrived

The Next Generation In RF Sensing Technology

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Our world class VI technology is now network enabled

Monitor RF Process Health | Prevent Product Scrap | Improve Process Yield

Octiv Poly

The Industrial Octiv VI Probe is a multi-frequency in-line RF voltage, current and phase measurement system with network communication (Ethernet Web Service Protocol, EtherNet/IP or EtherCAT available). It can measure multiple fundamental frequencies and their harmonics simultaneously with an accuracy of 1%. The OEM Poly and Suite VI Probes can detect and measure up to 5 fundamental frequencies and all their components (Voltage, Current, Phase Angle and Harmonics) at the same time.

The Industrial VI probe has pulse mode for analysing and monitoring pulsed rf processes.

The Octiv VI Probe systems allow users to measure a number of fundamental frequencies and extract all the harmonic information of each parameters measured simultaneously.





Features

Fully Customisable Form Factor | Process Tool Integration |
Ethernet Enabled | Industrial Communication Protocols


Applications

Process Diagnostic Monitoring | Real Time Feedback |
Integrated With Factory Servers | High Reliability Using Industrial Protocols




Overview

The Industrial Octiv VI Probe is a precision power and impedance sensor which normally sits post-match unit. It is used to measure the load impedance in applications such as plasma processes. It monitors voltage, current and phase of multiple fundamental frequencies and their harmonics. The Octiv Poly VI Probe is ideal for accurately monitoring dual frequency and triple frequency plasma systems.

The Octiv sensor has a power range from 0 to 12 kW and is calibrated at 5 different Frequencies: 2MHz | 13.56MHz | 27.12MHz | 40.68MHz | 60MHz. The system is frequency agile and can detect other frequency bands.

The Industrial Octiv is a high precision, high resolution sensor and high speed data acquisition unit combined. The Industrial Octiv sensor is the only precision power and impedance sensor with micro second resolution in pulsed applications. The sensor uses unique patented VI probe technology, designed for reliable operation in simultaneous multi-frequency applications with agile frequency tuning.

The Industrial Octiv helps solve issues related to poor production yields, rf tool matching; fault detection, rf fingerprinting and classification. The RF parameters are strongly correlated with plasma parameters. The Industrial Octiv VI Probe provides a wide range of parameters suitable for use in multivariate analysis in end point applications development. The sensor allows you to indirectly measure plasma parameters helping you to understand and control the process. It helps to define exact process windows and determines the health of power subsystems. The Octiv Poly helps determine process run to run stability. It gives you the confidence and insight to measure the power delivery parameters and map the plasma state.

RF Parameters Measured

  • Voltage
  • Current
  • Phase
  • Harmonics
  • Impedance

Measurement Functionality

Time Averaged Measurements
This provides an average over time of voltage, current and phase.

Time Resolved Measurements
This allows the user to synchronise the V,I & Phase measurements with pulsed rf. The user can select between an internal level trigger or an external TTL signal for pulsed synchronisation. Measurements have a 1us time resolution. The user can then obtain detailed information on the ion energy distribution as a function of time or phase through the synchronisation pulse period. Typically the pulse period would be on a timescale of milliseconds to microseconds.

Time Trend Measurements
This allows the user to obtain information on the variation of the voltage,current and phase as time progresses through a particular process from seconds to hours.

Industrial Octiv Tab System

Probe

Compact Design
The Industrial Octiv is designed to be compact and easy to install. It can be mounted pre- or post-match. The ideal position to give the most accurate measurement of the RF delivery into the plasma chamber is between the match unit and the plasma chamber.

Frequency Agility
The Industrial Octiv sensor allows the user to accurately measure the RF parameters while tracking a rapidly varying fundamental frequency. For example: in variable frequency tuning to match the plasma.

Octiv Pulsed Power Measurement
The Industrial Octiv sensor measures the pulsed power time profile at micro second resolution while maintaining a very high degree of accuracy (1%). It measures a single frequency at a time and 15 of its harmonics. The user can select the frequency they wish to analyse from a drop down menu of 5 frequencies or the user can request 5 specific frequencies at the time of order.

Industrial Communications Interface
The Industrial Octiv communications interface is provided over Ethernet network via a simple web service protocol. This provides power to the sensor, and supports sensor configuration and data transfer activities in a production environment.

Software

Meter View
View process parameters as they are acquired by the sensor. This feature provides a useful way of monitoring RF power delivery during process hardware setup and installation. Data can be recorded to a file for analysis.

Smith Chart View
Monitor the Load Impedance as it is displayed on a Smith Chart and track Impedance variations throughout the process cycle.

Harmonic View
With the unique Harmonic View, the voltage and current harmonics of the delivered signal may be monitored in real time. Observe the harmonic content of the delivered power, and intuitively identify harmonic components which may be sensitive to process variations.

Time Trend View
Use the Time Trend view to monitor each RF parameter in real-time. Visualise time-series data as it is acquired. Acquire an overview of each parameter during the process run and monitor run-to-run or chamber-to-chamber variations.

Software Application Programming Interface (API)
A comprehensive API is provided with the sensor to facilitate integration with 3rd party software applications. Sensor initialisation, configuration, and data transfer functions are easily implemented on all of the common software platforms. Basic examples are provided.

Measuring Parameters (Range)

Voltage Range Voltage 20 – 3000 Vrms
Current Range 0.1 – 20 Arms*
Phase Range ± 180º
Harmonic (Voltage, Current and Phase) Up to 15 Harmonics per frequency
Frequency Range 350 kHz - 300 MHz
Fundamental Frequencies 5 Simultaneous
Impedance 1 to 500 Ω
Power Real, Forward and Reflected (Watt) [Mono] 200 mW to 12 kW*
Power Real, Forward and Reflected (dBm) [Mono] 25 dBm to 70 dBm

*Connector dependent

Pulsed Parameters (Time)

Voltage Time 1 μs
Current Time 1 μs
Phase Time 1 μs
Harmonic (Voltage, Current and Phase) Time 1 μs
Frequency Time 1 μs
Impedance Time 1 μs
Power Real, Forward and Reflected (Watt) Time 1 μs
Power Real, Forward and Reflected (dBm) Time 1 μs

Measuring Parameters (Accuracy)

Voltage Accuracy ± 1%
Current Accuracy ± 1%
Phase Accuracy ± 1º
Harmonic (Voltage, Current and Phase) Accuracy ± 5%
Frequency Accuracy ± 10 kHz

Measuring Parameters (Resolution)

Voltage Resolution 0.25 V
Current Resolution 10 mA
Phase Resolution 0.01°
Harmonic (Voltage, Current and Phase) Resolution As Above
Frequency Resolution 1 kHz

Sensor

Number of fundamentals Maximum of 5 simultaneously
RF Power Max 12 kW (higher available with custom connector)
Operating Temperature 0 to +55°C (32 to 104°F)
Storage Temperature -20 to +80°C (-4 to +176°F)
Harmonic Content Measured (No Limit within Range)
Connectors N, HN, 7/16's, LC (Custom available on request)
Sensor Impedance 50 Ω
Calibration Cycle 12 Months

Application Software (USB 2.0)

Operating System Windows 2000 / XP / Vista / Windows 7 / Windows 8 / Windows 10
Connectivity Ethernet Web Service Protocol*

*EtherNet/IP and EtherCAT available on request

The Octiv Poly used in Atmospheric applications

Impedans Octiv used in a study demonstrating a simple radio-frequency (RF) power-coupling scheme for a micro atmospheric pressure plasma jet

Abstract

In this paper, the authors demonstrate a simple radio frequency (RF) power-coupling scheme for a micro atmospheric pressure plasma jet (μAPPJ) based on a series LC resonance, with the discharge gap being part of the resonant element. The Impedans Octiv was used in the experiment.

OC02: Impedans Octiv used in a study demonstrating a simple radio-frequency (RF) power-coupling scheme for a micro atmospheric pressure plasma jet (μAPPJ)

Technical note

Octiv VI Probe - Theory of Operation

Abstract

The Octiv VI probe is an advanced RF voltage and current sensor, which can provide real-time information on complex loads. Real-time information the Octiv provides includes voltage, current, phase, power and impedance on all harmonics of a chosen frequency simultaneously, as well as transmission line parameters such as forward power, reflected power, standing wave ratio (SWR) and reflection coefficient. The Octiv sensor was designed to meet the need for post-match voltage and current measurements in RF excited plasma processes.

OC03: Octiv VI Probe - Theory of Operation

OCTIV - Standards of Calibration

Abstract

High power radio-frequency (RF) voltage and current sensors need to be accurately calibrated to a traceable standard. Calibrating to high accuracy can be the most challenging aspect of high power, voltage-current sensor manufacture. This is due to the many sources of error in any calibration process. If the calibration is performed accurately and correctly, then most errors can be characterized and removed.

OC04: Octiv VI Technology - Standards of Calibration

OCTIV - Industrial Communication Protocols

Abstract

In this technical note, communication via industrial protocols such as EtherCat and Ethernet/IP are described. The Octiv VI probe is an advanced and versatile radio-frequency (RF) voltage and current sensor. It can be used in a variety of installation environments and has a wide range of applications. It sees widespread deployment on RF processing equipment used in the semiconductor (and related industries) and in the medical market. For research and development (R&D) activities, the Octiv application software supplied with the product is sufficient for data management. For industrial applications, customers want to process and store data in their own systems and therefore the flexibility to transmit the Octiv data using a range of protocols is critical.

OC05: Octiv VI Technology - Industrial Communication Protocols

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A word from our clients

"Impedans have been superb. Their customer service is great. The guys there respond very quickly'