Experts in Plasma Measurement


Plasma measurement is evolving

Are you ready for it?

Innovation of technology is growing at an unprecedented rate. Big data, IoTs and automation are the key drivers in our industry.

Is your business ready for the next iteration?

Not to worry, with our integrated sensors and technology, your business will have a bright future.

Our versatile plasma measurement tools adapt to any environment: R & D and Industry

Measurements include:

  • Uniformity
  • Ion Energy
  • Plasma Density

Contact a Plasma Specialist
Langmuir Probe

Plasma Volume Characterization

Langmuir Probe

Features
- Single & Double Probe Combined
- Advanced RF Compensation
- High Speed Acqusition


Applications
- Fundamental Research
- Process Development
- Equipment Design
- Model Validation





Semion System

Ion Energy, Ion Flux and Uniformity Analysis


Semion Multi Sensor


Features
- Substrate Bias Compatible
- High RF Bias Resistant
- Easily Installed
- High Temperature Resistant


Applications
- Process Parameters Correlation with Process Outcome
- Process Uniformity
- Process Development
- Equipment Design


Quantum System

Ion-Nuetral Deposition Rate Monitor

Quantum Single Sensor
Features
- Substrate Bias Compatible
- High RF Bias Resistant
- Easily Installed
- High Temperature Resistant
- No Cooling Required

Applications
- Ion-Neutral Deposition Rate Mapping
- Process Uniformity
- Process Development
- Equipment Design





We look forward to assisting you with your plasma measurement needs