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Fundamental Research Process Performance Process Transfer Quantum Semion 2500 Semion 2500 V4 Semion 3KV Semion pDC Tool Characterization Vertex

Measuring Ion Velocity Distributions and Ion Energy Distributions using Retarding Field Energy Analysers (RFEAs)

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Application Notes Semion 2500 V4 Tool Characterization

Ion energy measurements using Semion RFEA in a dual-high power impulse magnetron sputtering

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Application Notes Process Performance Semion 2500 V4

Time resolved measurements of IEDF using Semion RFEA in dual HIPIMS for Ti-Cu thin film deposition

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Application Notes Octiv Suite 2.0

Ion flux measurements using Octiv VI probe in RF Plasma Polymerisation of Furfuryl Methacrylate (FMA)

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Application Notes Octiv Poly 2.0

Impedans Octiv VI Probe used to study the relation between ion flux and deposition rate of organophosphate thin films in plasma

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Application Notes Octiv Poly 2.0 virtual metrology

Octiv VI probe used to measure the RF characteristics of a commercial CCP reactor

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Application Notes Octiv Poly 2.0 Tool Characterization

Electrical characterization of a RF powered micro atmospheric pressure plasma jet using Octiv VI probe

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Application Notes Octiv Suite 2.0

Ion flux measurements using Octiv VI Probe to study the deposition rates in plasma polymerization process

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Application Notes Langmuir Probe Octiv Poly 2.0 virtual metrology

Correlation between plasma parameters and Impedans Octiv VI probe measurements using Regression Analysis

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Application Notes Fundamental Research Langmuir Probe Model Validation

Impedans Langmuir Probe used for electron density measurements in dusty plasma produced by Coaxial Gridded Hollow Cathode Discharge

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Application Notes Fundamental Research Langmuir Probe Model Validation

Impedans’ Langmuir Probe used to study the EEPF characteristics of an expanding inductively coupled hydrogen plasma.

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Application Notes Fundamental Research Langmuir Probe

Langmuir Probe used in experimental and numerical investigations of the phase-shift effect in capacitively coupled plasma discharges