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Application Notes Process Performance Semion 2500 V4 Tool Characterization

Characterization of SiO2 pattern transfer in an ALE process using the Semion RFEA

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Application Notes Semion 2500 V4 Tool Characterization

Ion energy measurements of ions emitted by a mini-helicon thruster using Semion retarding field energy analyzer

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Fundamental Research Process Performance Process Transfer Quantum Semion 2500 Semion 2500 V4 Semion 3KV Semion pDC Tool Characterization Vertex

Measuring Ion Velocity Distributions and Ion Energy Distributions using Retarding Field Energy Analysers (RFEAs)

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Application Notes Semion 2500 V4 Tool Characterization

Ion energy measurements using Semion RFEA in a dual-high power impulse magnetron sputtering

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Application Notes Octiv Poly 2.0 Tool Characterization

Electrical characterization of a RF powered micro atmospheric pressure plasma jet using Octiv VI probe

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Application Notes Fundamental Research Langmuir Probe Tool Characterization

Plasma diagnostics of low-pressure high-power impulse magnetron sputtering assisted by electron cyclotron wave resonance plasma using Impedans Langmuir Probe

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Application Notes Langmuir Probe Tool Characterization

Measurements of plasma parameters in a BAI 730 M triode ion plating system using Impedans Langmuir probe

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Application Notes Fundamental Research Langmuir Probe Tool Characterization

Measurements of two-temperature electrons in magnetron sputtering plasma using Impedans Langmuir probe

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Application Notes Langmuir Probe Tool Characterization

Plasma plume characterization of a Hall Effect Thruster using Impedans Langmuir probe

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Application Notes Fundamental Research Langmuir Probe Tool Characterization

Time-resolved plasma characterization of modulated pulsed power magnetron sputtering using a Langmuir probe

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Application Notes Semion 2500 V4 Tool Characterization

Impedans Semion RFEA for Ion flux and ion energy distribution function measurements in synchronously pulsed inductively coupled plasmas