Categories Application Notes Process Performance Semion 2500 V4 Tool Characterization Characterization of SiO2 pattern transfer in an ALE process using the Semion RFEA Post author By Sean Mulcahy Post date October 5, 2022
Categories Fundamental Research Process Performance Process Transfer Quantum Semion 2500 Semion 2500 V4 Semion 3KV Semion pDC Tool Characterization Vertex Measuring Ion Velocity Distributions and Ion Energy Distributions using Retarding Field Energy Analysers (RFEAs) Post author By Sean Mulcahy Post date October 5, 2022
Categories Application Notes Process Performance Semion 2500 V4 Time resolved measurements of IEDF using Semion RFEA in dual HIPIMS for Ti-Cu thin film deposition Post author By Sean Mulcahy Post date October 5, 2022
Categories Application Notes Fundamental Research Process Performance Semion 2500 V4 Ion energy distributions measured at the biased electrode in bipolar pulsed DC discharges of methane using Impedans Semion RFEA Post author By Riyazul Mohamed Post date August 12, 2022
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