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Application Notes Applications Fundamental Research Octiv Mono 2.0 Octiv Poly 2.0 Octiv Suite 2.0 Process Performance

Bias potential measurement with Octiv VI probe during atomic layer etching of SiO2 and Si3N4 with Low Global Warming C4H3F7O Isomers

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Application Notes Fundamental Research Langmuir Probe Tool Characterization

Impedans Langmuir Probe used to analyse 13.56 MHz and 40 MHz capacitively coupled nitrogen plasmas

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Application Notes Fundamental Research Langmuir Probe

Langmuir probe used in a lunar dust application to measure the electron density and energy distribution

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Application Notes Fundamental Research Langmuir Probe

Electron negativity measurements during E to H transition in RF inductively coupled plasma using Impedans’ Langmuir Probe System

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Application Notes Fundamental Research Semion 2500 V4

Tailored ion energy distribution measurements at an rf-biased plasma electrode using Impedans’ Semion RFEA System

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Application Notes Fundamental Research Langmuir Probe

Microwave induced plasma characterization using Impedans Langmuir Probe

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Application Notes Fundamental Research Octiv Suite 2.0 Semion 2500 V4 Tool Characterization

The magnetic asymmetry effect in geometrically asymmetric RF capacitively coupled plasmas, characterized with Impedans’ Octiv Suite 2.0 VI probe and Semion RFEA system

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Application Notes Fundamental Research Langmuir Probe

Experimental investigations on time resolved characteristics of pulsed inductively coupled O2 /Ar plasmas using Impedans Langmuir Probe.

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Application Notes Fundamental Research Langmuir Probe Octiv Poly 2.0 Tool Characterization

Application of Impedans Langmuir Probe and Octiv Poly in ICP argon discharge to study electron kinetics and spatial transport

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Application Notes Fundamental Research Langmuir Probe Octiv Suite 2.0

AImpedans Langmuir Probe and Octiv Suite are used to study the time dependencies of pulsed inductively coupled Ar and Ar/CF4 discharges

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Application Notes Fundamental Research Langmuir Probe

Impedans Langmuir Probe is used to measure the negative ions in an electro-negative plasma

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Fundamental Research Process Performance Process Transfer Quantum Semion 2500 Semion 2500 V4 Semion 3KV Semion pDC Tool Characterization Vertex

Measuring Ion Velocity Distributions and Ion Energy Distributions using Retarding Field Energy Analysers (RFEAs)