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Application Notes Fundamental Research Process Performance Semion 2500 V4

Ion energy distributions measured at the biased electrode in bipolar pulsed DC discharges of methane using Impedans Semion RFEA

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Application Notes Semion 2500 V4 Tool Characterization

Impedans Semion RFEA for Ion flux and ion energy distribution function measurements in synchronously pulsed inductively coupled plasmas

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Application Notes

Impedans RFEA and Octiv VI probes for commercial technology development