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Application Notes Applications

Ion beam assisted chemical vapor deposition of hybrid coating – Process diagnostics and mechanisms using Impedans Plato Probe

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Application Notes Applications

Ion energy distribution measurements with Impedans Semion RFEA in Si -ALE using Cl2

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Application Notes Applications

Evaluation of Plasma Parameters Using the Impedans Langmuir Probe in HiPIMS and DCMS Systems

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Application Notes Applications

Plasma Characterization in a Laser-Plasma Hybrid Welding System Using the Impedans Langmuir Double Probe

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Application Notes Applications

Impedans Semion RFEA used for Ion energy measurements in Asynchronously Pulsed Plasma during High Aspect Ratio Nanoscale Si Trench Etching

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Application Notes Applications Fundamental Research Octiv Mono 2.0 Octiv Poly 2.0 Octiv Suite 2.0 Process Performance

Bias potential measurement with Octiv VI probe during atomic layer etching of SiO2 and Si3N4 with Low Global Warming C4H3F7O Isomers

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Application Notes Applications Octiv Mono 2.0 Octiv Poly 2.0 Octiv Suite 2.0 RF Match unit Characterization

Utilizing Impedans Octiv VI Probes for Characterization of RF Matching Networks

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Application Notes RF Match unit Characterization

RF Matchbox Characterization using Impedans Octiv VI Probes

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Application Notes Langmuir Probe Model Validation Process Performance Semion 2500 V4

Impedans’ Semion and Langmuir Probe systems used to study the SiO2 sputter etch rate in RF-Biased ICP discharge

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Application Notes Fundamental Research Langmuir Probe Tool Characterization

Impedans Langmuir Probe used to analyse 13.56 MHz and 40 MHz capacitively coupled nitrogen plasmas

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Application Notes Fundamental Research Langmuir Probe

Langmuir probe used in a lunar dust application to measure the electron density and energy distribution

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Application Notes Process Performance Semion 2500 V4

Semion retarding field energy analyzer used to investigate reactive HiPIMS + MF sputtering of TiO2 crystalline thin films