Matching Network Efficiency
Your company has paid a large sum of money for a piece of complex RF process equipment and your RF power supply is rated to 1% accuracy. That will give you great confidence that the process will be reliable and repeatable.
However, if 10 – 50% of that accurate power is lost in the matching network does that change things? Would you like to know how efficient your matching unit is?
So, even if 50% of the power is lost in the matching unit; you can probably learn to live with that as long as it is the same every time, Right! But, what if the match efficiency is not constant and changes every time you change the process gas flow, the gas type or the chamber pressure, that would not be so good, would it?