Atmospheric pressure plasmas are used for a wide variety of applications. A major advantage of atmospheric plasmas is that no vacuum equipment is required to create low pressure environments. Some of the applications include surface sterilization, for medical equipment and food containers, and surface activation in preparation for bonding or adhesion across many industries.
Impedans offer a range of products suitable for monitoring your atmospheric plasma process. We have products suited for research and development work such as process development or new tool design. We also have products for live monitoring of process tools during production. Atmospheric plasma types that may be suitable for our diagnostics include:
Providing real-time process feedback to enable critical decision making
Measuring charged particle concentrations and temperatures and the potential distribution of your discharge
Determining the health of your RF process using our unique RF sensing platform
Impedans specialises in the delivery of high performance and high resolution plasma diagnostics solutions to customers in research and industry. Our products find applications in plasma process research and development, process monitoring and control, and manufacturing tool development in the semiconductor, surface coating, flat panel, thin film and solar sectors.
Impedans' products represent the next generation in plasma diagnostics technology, and coupled with our in-depth plasma knowledge and years of experience, our customers can be sure that they can fully characterise, optimise and monitor their plasma processes with confidence.
Impedans Ltd.
Chase House, City Junction Business Park, Northern Cross, Dublin 17, D17 AK63, Ireland.
Ph: +353 1 842 8826 • Fax: +353 1 871 2282
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RF Sensing Platform
RF Event Detection
Plasma Volume Characterisation
Deposition Tolerant Langmuir Probe
RF Sensing Platform