Performing Well Under All Kinds of Pressure

Atmospheric pressure plasmas are used for a wide variety of applications. A major advantage of atmospheric plasmas is that no vacuum equipment is required to create low pressure environments. Some of the applications include surface sterilization, for medical equipment and food containers, and surface activation in preparation for bonding or adhesion across many industries.
Impedans offer a range of products suitable for monitoring your atmospheric plasma process. We have products suited for research and development work such as process development or new tool design. We also have products for live monitoring of process tools during production. Atmospheric plasma types that may be suitable for our diagnostics include:

OCTIV
INDUSTRIAL

RF Sensing Platform

Features
Ethernet Enabled | Industrial Communication Protocols | Customisable Form Factor | Full Integration Service

Applications
Process Health | Chamber Matching | Process Fingerprinting | Fault Detection | Substrate Placement

ALFVEN
100

RF Event Detection

Features
Ethernet Enabled | Industrial Communication Protocols | Pre-Match Design | Full Integration Service

Applications
Process Arcs | Instabilities | Ingition Phenomena | Missing RF Pulses

LANGMUIR

Plasma Volume Characterisation

Features
Single & Double Probe Combined | Advanced RF Compensation | High Speed Acqusition | Spatial Scanning

Applications
Fundamental Research | Process Development | Equipment Design | Model Validation

PLATO

Deposition Tolerant Langmuir Probe

Features
Deposition Tolerant | High Speed Acqusition | Spatial Scanning | Customisable Form Factor for Process Integration

Applications
Fundamental Research | Process Development | Equipment Design | Model Validation

OCTIV

RF Sensing Platform

Features
Interchangeable Connectors | USB & RS232 Protocols | Multiple Frequency Ranges on One Unit | Wide Power Range

Applications
Power Metering | Match Network Characterization | RF Subsystem Health | Process Monitoring