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Integrated Sensors for Production

Providing real-time process feedback to enable critical decision making


OCTIV
INDUSTRIAL

RF Sensing Platform

Features
Ethernet Enabled | Industrial Communication Protocols | Customisable Form Factor | Full Integration Service

Applications
Process Health | Chamber Matching | Process Fingerprinting | Fault Detection | Substrate Placement


ALFVEN
100

RF Event Detection

Features
Ethernet Enabled | Industrial Communication Protocols | Pre-Match Design | Full Integration Service

Applications
Process Arcs | Instabilities | Ingition Phenomena | Missing RF Pulses


Substrate & Surface Level Measurement

Seeing the ions that drive your plasma process


SEMION

Ion Energy Distribution Analysis

Features
Substrate Bias Compatible | High RF Bias Resistant | Easily Installed | High Temperature Resistant

Applications
Process Parameters Correlation with Process Outcome | Process Uniformity | Process Development | Equipment Design


VERTEX

Ion Energy Distribution versus Aspect Ratio

Features
Substrate Bias Compatible | High RF Bias Resistant | Easily Installed | High Temperature Resistant

Applications
High Aspect Ratio Processing | Process Uniformity | Process Development | Equipment Design


QUANTUM

Etch & Deposition Rates | Ion Energy Distributions

Features
Substrate Bias Compatible | High RF Bias Resistant | Easily Installed | High Temperature Resistant

Applications
Ion Versus Neutral Deposition Rate Comparison | Process Development | Equipment Design



Plasma Volume Measurement

Measuring charged particle concentrations and temperatures and the potential distribution of your discharge


LANGMUIR

Plasma Volume Characterisation

Features
Single & Double Probe Combined | Advanced RF Compensation | High Speed Acqusition | Spatial Scanning

Applications
Fundamental Research | Process Development | Equipment Design | Model Validation


PLATO

Deposition Tolerant Langmuir Probe

Features
Deposition Tolerant | High Speed Acqusition | Spatial Scanning | Customisable Form Factor for Process Integration

Applications
Fundamental Research | Process Development | Equipment Design | Model Validation


General RF Power & Impedance

Determining the health of your RF process using our unique RF sensing platform


OCTIV

RF Sensing Platform

Features
Interchangeable Connectors | USB & RS232 Protocols | Multiple Frequency Ranges on One Unit | Wide Power Range

Applications
Power Metering | Match Network Characterization | RF Subsystem Health | Process Monitoring