Octiv Mono Applications

The Octiv Mono used in RF Match Network Characterization applications

Octiv Mono used in RF Match Network Characterization to measure match-unit range, efficiency, quality and internal resistance

Abstract

It is reported that a RF match network can have up to 50% power loss in a plasma process or any process with a RF power delivery system to a non-50ohm load causing variability within the process. In this document we discuss a novel method to characterize a matching network using two Octiv Monos

Octiv Mono used in RF Matching Network Characterization.pdf