Using Impedans Semion RFEA System to measure the effect of gas pressure on Ion Energy in a very-high frequency (VHF) magnetron sputtering discharge. Post date March 30, 2023 ← Analysis of 13.56 MHz and 40 MHz capacitively coupled nitrogen plasmas → Investigation of the performances of the microwave plasma source ‘Aura-wave’ by Impedans Langmuir Probe System
ImpedansImpedansImpedans