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Measure the key plasma parameters such as electron temperature, ion density, plasma potential and electron energy distribution function.
The probe functions correctly even when coated with a thin layer of non conductive material.
Our Langmuir Probe systems are modular and can be quickly and easily installed on chambers with various flange options. Our probes are also compatible with almost all chamber types.
Our software, which can be installed on any PC or laptop, is very intuitive and user friendly.
All of the products in our Langmuir range come with an optional linear drive. This can be used to automatically scan across the wafer and spatially characterize your plasma.
All of our Plato Probes come with tips that can be easily replaced.
We have multiple models including fixed shaft and flexible shaft versions which allow for easy installation in all scenarios.
Our Plato Probe technology does not require RF filters and will work for all plasma types.
The Plato Probe is a planar Langmuir Probe designed to work in deposition plasmas when an insulating film will be deposited on the probe surface. The deposition tolerant probe can remain inside a plasma reactor while deposition processes are in progress. This allows the plasma parameters such as plasma density, Ion current density and electron temperature to be measured in systems where a standard Langmuir probe would not be suitable, such as plasma enhanced chemical vapour deposition (PECVD) systems. This probe also has a sync function for time resolved measurements, to look at plasma evolution in Pulsed DC and HiPIMS processes with 1 microsecond resolution
Measure the key parameters of your plasma so that you can understand and control the outcome.
Measure the parameters in real time, allowing you to make changes and monitor the effects live, saving hours of unnecessary setup and waiting.
The Plato Probe is a planar Langmuir Probe designed to work in deposition plasmas when an insulating film will be deposited on the probe surface.
The deposition tolerant probe can remain inside a plasma reactor while deposition processes are in progress.
Our Langmuir systems are very easy to install in any plasma chamber. The system is small enough to be easily portable meaning a single system can be used in multiple chambers. It has a main electronics unit and a probe with vacuum feedthrough. The probe comes with a CF40 flange but we can also provide adapters to alternative flanges as needed.
Our linear drives also come with a CF40 flange but adapters can be provided.
Our software has been designed to be easy to use and can be installed on any laptop or PC.
Once installed the software allows the user to configure the system, run the scan, visualize the data and import/export data as needed.
The system will automatically apply the complex langmuir probe algorithms to present the calculated parameters. The user also has the option to chose between several algorithms.
Our systems come with an optional linear drive which allows you to scan spatially across your plasma. The software communicates with the linear drive allowing you to control the positioning and plot the data within the software saving you time and effort when analyzing your data.
The linear drives come with bellows support, a full cover and manual readouts.
All of our langmuir probes come with replaceable tips meaning they can easily be replaced when maintenance is required. We have several tip and material options to choose from to best suit your application.
The probe has multiple custom options including right angle elbows and flexible probe shafts to fit any chamber.
Plato probe with a fixed length shaft will need a direct line of sight into the plasma from the vacuum port.
If direct line of sight cannot be achieved then using the Flexible Plato probe this limitation can be overcome.
Electronics Unit
Probe
Flexible Probe
| Part Number | Description | Description | |
|---|---|---|---|
|
02-0073-01 |
Fixed Probe 10mm |
9.5mm OD, rigid, Alumina Shaft |
|
|
02-0240-01 |
Flexible Probe |
Rigid tip section with flexible ceramic beaded cable |
|
|
02-0239-01 |
Feed-through for flexible shaft models |
Feed-through for flexible Plato Probes |
|
|
02-0238-01 |
Electronics Unit |
VI scanning and measurement electronics |
| Part Number | Product Name | Description | |
|---|---|---|---|
|
02-0507-01 |
150mm Linear Drive |
For rigid probe shafts only |
|
|
02-0033-03 |
300mm Linear Drive |
For rigid probe shafts only |
|
|
02-0034-04 |
450mm Linear Drive |
For rigid probe shafts only |
|
|
02-0035-04 |
600mm Linear Drive |
For rigid probe shafts only |
|
|
02-0508-01 |
900mm Linear Drive |
For rigid probe shafts only |
*Information on Multiple Tip Styles Available Upon Request
