Fault Detection & Classification

Impedans Ltd is a leading provider of advanced plasma diagnostics and process monitoring solutions. Our sensors are designed to provide high-precision measurements that help manufacturers detect and classify faults in their plasma processing systems. We provide live RF monitoring, plasma sensors, and other solutions to help manufacturers troubleshoot problems, improve process stability, and optimize their production processes.

Our live RF monitoring solutions are particularly effective at detecting faults such as vacuum leaks, gas flow issues, RF power supply issues, tool wear, and wafer misplacement. These faults can all have a significant impact on the quality of the finished product, and detecting them early can help manufacturers minimize waste, reduce downtime, and improve yield.

In addition to our live RF monitoring solutions, we also provide plasma sensors that can be used to troubleshoot problems and compare results to expected values. These sensors are designed to provide high-precision measurements of key plasma parameters, including electron density, electron temperature, and ion energy distribution. By comparing these measurements to expected values, manufacturers can quickly identify potential faults and take corrective action.

Our plasma sensors are available in a range of configurations to suit different applications and can be easily integrated into existing plasma processing systems. They are also designed to be easy to use, with intuitive software interfaces and APIs that provide real-time feedback on process performance.

Bulk Plasma Sensors

Best for: Plasma Density, Electron Energy Distribution Function, Electron temperature, Plasma Potential, Ion flux, Spatial Resolution, Time Resolution

Measures: ion density, electron temperature, plasma potential, ion flux

Substrate Level Sensors

Best for: Ion Energy, Deposition Rate, Ion Angle

Measures: Ion Energy, Ion Flux, Ion Angle, Deposition Rate

RF Sensors

Impedans RF Voltage Current Probe - Octiv Poly 2.0

Best for: RF Calibration, RF Parameters, Live Process Monitoring, Fault Detection & Classification

Measures: RF Voltage, Current, Phase, Power and Impedance of the fundamental and harmonic frequencies. Also measures RF waveform and ion flux

If you have questions about what product is most suited to your process design needs

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Application Notes